Device-Quality $\beta$-Ga$_{2}$O$_{3}$ Epitaxial Films Fabricated by Ozone Molecular Beam Epitaxy

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Bibliographic Details
Published in:Applied physics express 2012-03, Vol.5 (3), p.35502
Main Authors: Sasaki, Kohei, Kuramata, Akito, Masui, Takekazu, Víllora, Encarnación G., Shimamura, Kiyoshi, Yamakoshi, Shigenobu
Format: Article
Language:eng ; jpn
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ISSN:1882-0778
1882-0786
DOI:10.1143/APEX.5.035502