The Distribution of the Excess Vacancies in the Bulk at the Diffusion of Phosphorus into Silicon

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics 1977-01, Vol.16 (7), p.1177-1185
Main Authors: Matsumoto, Satoru, Arai, Eisuke, Nakamura, Hiroaki, Niimi, Tatsuya
Format: Article
Language:English
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.16.1177