Microwave Plasma Etching

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1977-01, Vol.16 (11), p.1979-1984
Main Authors: Suzuki, Keizo, Okudaira, Sadayuki, Sakudo, Noriyuki, Kanomata, Ichiro
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.16.1979