Dependence of Surface Flatness on the LPE Condition of AlGaSb

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1978-11, Vol.17 (11), p.2061-2062
Main Authors: Motosugi, George, Kagawa, Toshiaki
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.17.2061