Zinc diffusion into InSb

A systematic study has been performed on diffusion of Zn in InSb using elemental Zn and Sb as the source in closed ampoules at 355–455°C. The diffusion behavior could be well understood by arranging the data as a function of the mole ratio of Sb to Zn in the source, N Sb / N Zn . The diffusion depth...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1983-01, Vol.22 (5), p.836-841
Main Authors: NISHITANI, K, NAGAHAMA, K, MUROTANI, T
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Diffusion in solids
Diffusion of impurities
Exact sciences and technology
Physics
Transport properties of condensed matter (nonelectronic)
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Summary:A systematic study has been performed on diffusion of Zn in InSb using elemental Zn and Sb as the source in closed ampoules at 355–455°C. The diffusion behavior could be well understood by arranging the data as a function of the mole ratio of Sb to Zn in the source, N Sb / N Zn . The diffusion depth was constant and independent of the total amount of Zn and/or Sb when N Sb / N Zn ≤0.5 or when N Sb / N Zn ≥5, if the Zn source was enough. When N Sb / N Zn ≥5, a highly planar, reproducible diffusion front was obtained. However, when N Sb / N Zn
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.22.836