An improved optical lever technique for measuring film stress

This letter describes a simple and accurate method of measuring film stress. This method differs principally from the conventional optical lever method in utilizing two parallel beams instead of translating a sample. The apparatus assembled experimentally demonstrates a detectable deflection of the...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1989-02, Vol.28 (2), p.299-300
Main Authors: AOKI, T, NISHIKAWA, Y, KATO, S
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Mechanical and acoustical properties of condensed matter
Mechanical properties of solids
Physics
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Description
Summary:This letter describes a simple and accurate method of measuring film stress. This method differs principally from the conventional optical lever method in utilizing two parallel beams instead of translating a sample. The apparatus assembled experimentally demonstrates a detectable deflection of the sample on the order of 1 µm.
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.28.299