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Formation of As-Grown BiSrCaCuO Thin Films by Sputtering Three Targets Heavily Doped with Pb in Atmospheres of O 2 and N 2 O/O 2 Mixtures
As-grown BiSrCaCuO thin films have been formed on MgO(100) substrates at various temperatures by RF magnetron sputtering from three targets in atmospheres of neat O 2 and N 2 O/O 2 mixtures (1:1). The three targets had slightly different compositions heavily doped with Pb: Bi 3 Pb 3 Sr 2 Ca 2 Cu 3 O...
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| Published in: | Japanese Journal of Applied Physics 1990-06, Vol.29 (6R), p.1066 |
|---|---|
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Citations: | Items that this one cites Items that cite this one |
| Online Access: | Get full text |
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| Summary: | As-grown BiSrCaCuO thin films have been formed on MgO(100) substrates at various temperatures by RF magnetron sputtering from three targets in atmospheres of neat O
2
and N
2
O/O
2
mixtures (1:1). The three targets had slightly different compositions heavily doped with Pb: Bi
3
Pb
3
Sr
2
Ca
2
Cu
3
O
x
, Bi
2
Pb
2
Sr
3
Ca
3
Cu
3
O
x
and Bi
2
Pb
2
Sr
2
Ca
2
Cu
4.5
O
x
. Both films formed in O
2
and N
2
O/O
2
mixtures at 660°C showed zero resistivity at 77–78 K. A film obtained at 540°C by N
2
O/O
2
mixtures showed superconductivity, while a film obtained at the same substrate temperature by neat O
2
did not.
Gas mixtures of N
2
O and O
2
used instead of neat O
2
as a sputtering gas were effective in lowering the growth temperature by 20–40 degrees. |
|---|---|
| ISSN: | 0021-4922 1347-4065 |
| DOI: | 10.1143/JJAP.29.1066 |