Thin Film Structure of YBa 2 Cu 3 O 7-δ on (001) MgO Substrate Studied by TEM

A plan-view TEM observation was made for YBa 2 Cu 3 O 7-δ (YBCO) thin films prepared by MOCVD on (001) MgO substrates. For the TEM observation, the MgO substrate plates were ion-thinned before the YBCO deposition. The YBCO thin films were found to be polycrystalline with a grain size of about 0.5 µm...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1990-09, Vol.29 (9A), p.L1648
Main Authors: Suzuki, Hajime, Kurosawa, Hideyuki, Miyagawa, Katsumi, Hirotsu, Yoshihiko, Era, Masanori, Yamashita, Tsutomu, Yamane, Hisanori, Hirai, Toshio
Format: Article
Language:English
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Summary:A plan-view TEM observation was made for YBa 2 Cu 3 O 7-δ (YBCO) thin films prepared by MOCVD on (001) MgO substrates. For the TEM observation, the MgO substrate plates were ion-thinned before the YBCO deposition. The YBCO thin films were found to be polycrystalline with a grain size of about 0.5 µm. Most of the YBCO grains are grown with their [001] axes nearly normal to the MgO substrate plane. Between the neighboring YBCO grains, a small-angle misorientation was observed quite frequently. Most of the misorientation angles measured by selected-area electron diffraction were less than about 5 degrees. At the small-angle grain boundaries, a nearly periodic array of dislocations was observed in the high-resolution lattice images. The AC and DC Josephson effects of YBCO thin film bridges reported previously are discussed in relation to the small-angle grain boundaries.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.29.L1648