A soft X-ray microscope using an imaging detector

An X-ray microscope, consisting of a Wolter-type mirror and an imaging detector, was constructed. The configuration of the mirror was optimized by the ray-tracing procedure. The resolution of the imaging detector was estimated to be better than 1 µm from the spot diagram of the electron lenses. A ph...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1990, Vol.29 (1), p.L176-L178
Main Authors: INOUE, S, OGAWA, Y, UEDA, K, SUMIYA, M, TAKIGAWA, T, AOKI, S
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
X- and γ-ray instruments and techniques
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Summary:An X-ray microscope, consisting of a Wolter-type mirror and an imaging detector, was constructed. The configuration of the mirror was optimized by the ray-tracing procedure. The resolution of the imaging detector was estimated to be better than 1 µm from the spot diagram of the electron lenses. A photocathode made of a CsI layer as a photoemitter and a SiN x membrane as a support for the CsI layer is presented. The fundamental performance of the X-ray microscope has been evaluated, and its resolution has been estimated to be better than 2 µm.
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.29.l176