Autofocusing system of optical microscope utilizing electrostrictive actuators

A precise positioning table equipped with a pair of electrostrictive actuators and hinged levers has been manufactured. A good displacement-vs-applied-voltage relationship has been achieved with an 18-µm stroke and small hysteresis. An autofocusing system of an optical microscope utilizing the table...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1991-06, Vol.30 (6), p.1290-1294
Main Authors: SUYAMA, R, TANEMOTO, K, KOBAYASHI, Y, YAJIMA, M
Format: Article
Language:English
Subjects:
Conventional optical microscopes
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Optical instruments, equipment and techniques
Physics
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Summary:A precise positioning table equipped with a pair of electrostrictive actuators and hinged levers has been manufactured. A good displacement-vs-applied-voltage relationship has been achieved with an 18-µm stroke and small hysteresis. An autofocusing system of an optical microscope utilizing the table has been assembled. The system has high precision (0.035 µm) of repeated positioning and can focus a microscope with ×100 magnification of the objective lens.
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.30.1290