Force microscopy using common-path optical-heterodyne interferometer

This paper proposes a common-path optical-heterodyne interferometer for developing a very stable force microscope. The deflections of the force-sensing cantilever are detected by the optical heterodyne method which reduces low-frequency noise. The optical system is a common-path interferometer using...

Full description

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics 1991-03, Vol.30 (3), p.587-590
Main Authors: KIKUTA, H, ASAI, S, YOSUKOCHI, H, IWATA, K
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Other topics in instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This paper proposes a common-path optical-heterodyne interferometer for developing a very stable force microscope. The deflections of the force-sensing cantilever are detected by the optical heterodyne method which reduces low-frequency noise. The optical system is a common-path interferometer using a Wollaston prism, which reduces the effects of mechanical vibrations and perturbation of the optical path length. In this paper, we proposed the optical system, constructed a system and measured the surface profile of optical disk grooves.
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.30.587