Force microscopy using common-path optical-heterodyne interferometer

This paper proposes a common-path optical-heterodyne interferometer for developing a very stable force microscope. The deflections of the force-sensing cantilever are detected by the optical heterodyne method which reduces low-frequency noise. The optical system is a common-path interferometer using...

Full description

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics 1991-03, Vol.30 (3), p.587-590
Main Authors: KIKUTA, H, ASAI, S, YOSUKOCHI, H, IWATA, K
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Other topics in instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
cited_by cdi_FETCH-LOGICAL-c356t-ce260155b75f3af2ad8889f0bca59b646ddec04c3c8b82046937c803bf0a23f33
cites cdi_FETCH-LOGICAL-c356t-ce260155b75f3af2ad8889f0bca59b646ddec04c3c8b82046937c803bf0a23f33
container_end_page 590
container_issue 3
container_start_page 587
container_title Japanese Journal of Applied Physics
container_volume 30
creator KIKUTA, H
ASAI, S
YOSUKOCHI, H
IWATA, K
description This paper proposes a common-path optical-heterodyne interferometer for developing a very stable force microscope. The deflections of the force-sensing cantilever are detected by the optical heterodyne method which reduces low-frequency noise. The optical system is a common-path interferometer using a Wollaston prism, which reduces the effects of mechanical vibrations and perturbation of the optical path length. In this paper, we proposed the optical system, constructed a system and measured the surface profile of optical disk grooves.
doi_str_mv 10.1143/jjap.30.587
format article
fullrecord <record><control><sourceid>pascalfrancis_cross</sourceid><recordid>TN_cdi_crossref_primary_10_1143_JJAP_30_587</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>19762783</sourcerecordid><originalsourceid>FETCH-LOGICAL-c356t-ce260155b75f3af2ad8889f0bca59b646ddec04c3c8b82046937c803bf0a23f33</originalsourceid><addsrcrecordid>eNpFULFOwzAUtBBIlMLED2RhQg62n-04Y1UoUFWCAebIebFpqiaO7DD070nVSkzv7nT3dDpC7jnLOZfwtNvZIQeWK1NckBkHWVDJtLokM8YEp7IU4prcpLSbqFaSz8jzKkR0WddiDAnDcMh-U9v_ZBi6LvR0sOM2C8PYot3TrRtdDM2hd1nbT9BPrDtqt-TK231yd-c7J9-rl6_lG918vL4vFxuKoPRI0QnNuFJ1oTxYL2xjjCk9q9GqstZSN41DJhHQ1EYwqUso0DCoPbMCPMCcPJ7-Hsum6Hw1xLaz8VBxVh0HqNbrxWcFrJoGmNwPJ_dg01TfR9tjm_4jZaFFYQD-AJpDXIw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Force microscopy using common-path optical-heterodyne interferometer</title><source>Institute of Physics IOPscience extra</source><source>Institute of Physics</source><creator>KIKUTA, H ; ASAI, S ; YOSUKOCHI, H ; IWATA, K</creator><creatorcontrib>KIKUTA, H ; ASAI, S ; YOSUKOCHI, H ; IWATA, K</creatorcontrib><description>This paper proposes a common-path optical-heterodyne interferometer for developing a very stable force microscope. The deflections of the force-sensing cantilever are detected by the optical heterodyne method which reduces low-frequency noise. The optical system is a common-path interferometer using a Wollaston prism, which reduces the effects of mechanical vibrations and perturbation of the optical path length. In this paper, we proposed the optical system, constructed a system and measured the surface profile of optical disk grooves.</description><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.1143/jjap.30.587</identifier><identifier>CODEN: JJAPA5</identifier><language>eng</language><publisher>Tokyo: Japanese journal of applied physics</publisher><subject>Exact sciences and technology ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Other topics in instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Physics</subject><ispartof>Japanese Journal of Applied Physics, 1991-03, Vol.30 (3), p.587-590</ispartof><rights>1991 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c356t-ce260155b75f3af2ad8889f0bca59b646ddec04c3c8b82046937c803bf0a23f33</citedby><cites>FETCH-LOGICAL-c356t-ce260155b75f3af2ad8889f0bca59b646ddec04c3c8b82046937c803bf0a23f33</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=19762783$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>KIKUTA, H</creatorcontrib><creatorcontrib>ASAI, S</creatorcontrib><creatorcontrib>YOSUKOCHI, H</creatorcontrib><creatorcontrib>IWATA, K</creatorcontrib><title>Force microscopy using common-path optical-heterodyne interferometer</title><title>Japanese Journal of Applied Physics</title><description>This paper proposes a common-path optical-heterodyne interferometer for developing a very stable force microscope. The deflections of the force-sensing cantilever are detected by the optical heterodyne method which reduces low-frequency noise. The optical system is a common-path interferometer using a Wollaston prism, which reduces the effects of mechanical vibrations and perturbation of the optical path length. In this paper, we proposed the optical system, constructed a system and measured the surface profile of optical disk grooves.</description><subject>Exact sciences and technology</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Other topics in instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Physics</subject><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1991</creationdate><recordtype>article</recordtype><recordid>eNpFULFOwzAUtBBIlMLED2RhQg62n-04Y1UoUFWCAebIebFpqiaO7DD070nVSkzv7nT3dDpC7jnLOZfwtNvZIQeWK1NckBkHWVDJtLokM8YEp7IU4prcpLSbqFaSz8jzKkR0WddiDAnDcMh-U9v_ZBi6LvR0sOM2C8PYot3TrRtdDM2hd1nbT9BPrDtqt-TK231yd-c7J9-rl6_lG918vL4vFxuKoPRI0QnNuFJ1oTxYL2xjjCk9q9GqstZSN41DJhHQ1EYwqUso0DCoPbMCPMCcPJ7-Hsum6Hw1xLaz8VBxVh0HqNbrxWcFrJoGmNwPJ_dg01TfR9tjm_4jZaFFYQD-AJpDXIw</recordid><startdate>19910301</startdate><enddate>19910301</enddate><creator>KIKUTA, H</creator><creator>ASAI, S</creator><creator>YOSUKOCHI, H</creator><creator>IWATA, K</creator><general>Japanese journal of applied physics</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>19910301</creationdate><title>Force microscopy using common-path optical-heterodyne interferometer</title><author>KIKUTA, H ; ASAI, S ; YOSUKOCHI, H ; IWATA, K</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c356t-ce260155b75f3af2ad8889f0bca59b646ddec04c3c8b82046937c803bf0a23f33</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1991</creationdate><topic>Exact sciences and technology</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Other topics in instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Physics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>KIKUTA, H</creatorcontrib><creatorcontrib>ASAI, S</creatorcontrib><creatorcontrib>YOSUKOCHI, H</creatorcontrib><creatorcontrib>IWATA, K</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>KIKUTA, H</au><au>ASAI, S</au><au>YOSUKOCHI, H</au><au>IWATA, K</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Force microscopy using common-path optical-heterodyne interferometer</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><date>1991-03-01</date><risdate>1991</risdate><volume>30</volume><issue>3</issue><spage>587</spage><epage>590</epage><pages>587-590</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><coden>JJAPA5</coden><abstract>This paper proposes a common-path optical-heterodyne interferometer for developing a very stable force microscope. The deflections of the force-sensing cantilever are detected by the optical heterodyne method which reduces low-frequency noise. The optical system is a common-path interferometer using a Wollaston prism, which reduces the effects of mechanical vibrations and perturbation of the optical path length. In this paper, we proposed the optical system, constructed a system and measured the surface profile of optical disk grooves.</abstract><cop>Tokyo</cop><pub>Japanese journal of applied physics</pub><doi>10.1143/jjap.30.587</doi><tpages>4</tpages></addata></record>
fulltext fulltext
identifier ISSN: 0021-4922
ispartof Japanese Journal of Applied Physics, 1991-03, Vol.30 (3), p.587-590
issn 0021-4922
1347-4065
language eng
recordid cdi_crossref_primary_10_1143_JJAP_30_587
source Institute of Physics IOPscience extra; Institute of Physics
subjects Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Other topics in instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
title Force microscopy using common-path optical-heterodyne interferometer
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-07T15%3A43%3A04IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-pascalfrancis_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Force%20microscopy%20using%20common-path%20optical-heterodyne%20interferometer&rft.jtitle=Japanese%20Journal%20of%20Applied%20Physics&rft.au=KIKUTA,%20H&rft.date=1991-03-01&rft.volume=30&rft.issue=3&rft.spage=587&rft.epage=590&rft.pages=587-590&rft.issn=0021-4922&rft.eissn=1347-4065&rft.coden=JJAPA5&rft_id=info:doi/10.1143/jjap.30.587&rft_dat=%3Cpascalfrancis_cross%3E19762783%3C/pascalfrancis_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c356t-ce260155b75f3af2ad8889f0bca59b646ddec04c3c8b82046937c803bf0a23f33%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true