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Property Control for High-Quality Ba 1-x K x BiO 3 Epitaxial Thin Films Prepared by High-Pressure Reactive rf-Magnetron Sputtering
The electrical properties of Ba 1- x K x BiO 3 (BKBO) epitaxial thin films on SrTiO 3 (110) substrates have been successfully controlled using high-pressure reactive rf-magnetron sputtering under an 80-Pa discharge gas. We investigated the relationship between the target composition and the electric...
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Published in: | Japanese Journal of Applied Physics 1993-05, Vol.32 (5R), p.1946 |
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Main Authors: | , , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The electrical properties of Ba
1-
x
K
x
BiO
3
(BKBO) epitaxial thin films on SrTiO
3
(110) substrates have been successfully controlled using high-pressure reactive rf-magnetron sputtering under an 80-Pa discharge gas. We investigated the relationship between the target composition and the electrical properties of BKBO films. The zero resistance temperature (
T
ce
) and the temperature dependence of resistivity above the superconducting onset temperature (
T
co
) were found to be primarily influenced by the ratio of Ba/K and the Bi content of the target composition, respectively. Electrical measurements showed that the highest Tce of as-grown BKBO epitaxial film was 28 K. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.32.1946 |