Dielectric properties of multilayered ferroelectric thin films fabricated by sol-gel method

• Published in: Japanese Journal of Applied Physics 1994, Vol.33 (9B), p.5272-5276
• Main Authors: OHYA, Y, ITO, T, TAKAHASHI, Y
• Format: Article
• Language: English
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Cross-disciplinary physics: materials science; rheology; Dielectric thin films; Dielectric, piezoelectric, ferroelectric and antiferroelectric materials; Dielectrics, piezoelectrics, and ferroelectrics and their properties; Exact sciences and technology; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Niobates, titanates, tantalates, pzt ceramics, etc; Physics
• ISSN: 0021-4922; 1347-4065
• DOI: 10.1143/jjap.33.5272

Multilayered thin films of ferroelectric perovskites were fabricated by the sol-gel method. The investigated films were PbTiO 3 , PbZrO 3 , BaTiO 3 and SrTiO 3 , and their multilayered films. The films were prepared by dipping and heating in air at 600–700° C. The microstructures and crystalline phases of the single component and their multilayered films were examined. The multilayered film of PbTiO 3 and PbZrO 3 has a very clear interface between the components, though that between PbTiO 3 and SrTiO 3 was not clear due to the diffusion of the lead component from the PbTiO 3 layer into the SrTiO 3 layer and the formation of a solid solution. The dielectric constant of the multilayered films and its dependence on temperature could not be explained by the series connection of those of the component films.