Characterization of Interdiffusion in SrTiO 3 /YBa 2 Cu 3 O 7-x Multilayers by In Situ Auger Electron Spectroscopy

In situ deposition and surface characterization by Auger electron spectroscopy enabled precise surface composition analysis. The annealing temperature dependence of the surface composition in SrTiO 3 (2.8 nm)/YBa 2 Cu 3 O 7- x and YBa 2 Cu 3 O 7- x (2.7 nm)/SrTiO 3 multilayers revealed the diffusion...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1995-09, Vol.34 (9R), p.4765
Main Authors: Nakamura, Takao, Michitomo Iiyama, Michitomo Iiyama
Format: Article
Language:English
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Summary:In situ deposition and surface characterization by Auger electron spectroscopy enabled precise surface composition analysis. The annealing temperature dependence of the surface composition in SrTiO 3 (2.8 nm)/YBa 2 Cu 3 O 7- x and YBa 2 Cu 3 O 7- x (2.7 nm)/SrTiO 3 multilayers revealed the diffusion of each of the constituent atoms. The interdiffusion is negligible below 600° C. Ba atom diffusion into SrTiO 3 was dominant in the temperature range from 600° C to 660° C. The activation energy was calculated to be 2.4 eV. Ti atom diffusion into YBa 2 Cu 3 O 7- x became distinctive above 660° C. The activation energy of Ti was 4.4 eV.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.34.4765