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The influence of surface treatment on the quality of Pd/Au contacts to p-type ZnSe

The influence of surface treatment prior to the deposition of Pd/Au metallic contacts to p-type ZnSe is discussed. The methods studied being a sulphur based treatment and a CuSe x contact treatment. The results show that both of these form better quality contacts, with lower applied voltages for set...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1996, Vol.35 (3), p.1664-1667
Main Authors: RENNIE, J, ONOMURA, M, NISHIKAWA, Y, SAITO, S, ISHIKAWA, M, HATAKOSHI, G.-I
Format: Article
Language:English
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Summary:The influence of surface treatment prior to the deposition of Pd/Au metallic contacts to p-type ZnSe is discussed. The methods studied being a sulphur based treatment and a CuSe x contact treatment. The results show that both of these form better quality contacts, with lower applied voltages for set current densities, in comparison to an untreated sample. Although, the barrier height increased for the sulphur treated sample, by 0.11 eV to 0.69 eV, the active contact area was increased by an order of magnitude. The CuSe x treatment is shown to reduce the Schottky barrier height to 0.50 eV but the active contact area was severely reduced in this case.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.35.1664