A plasma source using waves in a lower hybrid frequency range

Plasma production using the waves in a lower hybrid frequency range is investigated numerically and experimentally. The radial profiles of wave field and power absorption by electrons are calculated using a one-dimensional kinetic wave code. The two-dimensional fluid simulation code is coupled with...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1997-07, Vol.36 (7B), p.4572-4575
Main Authors: YASAKA, Y, OHNISHI, K, KIKUCHI, T, TACHIBANA, K, ITOH, T
Format: Article
Language:English
Subjects:
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma production and heating
Plasma sources
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Summary:Plasma production using the waves in a lower hybrid frequency range is investigated numerically and experimentally. The radial profiles of wave field and power absorption by electrons are calculated using a one-dimensional kinetic wave code. The two-dimensional fluid simulation code is coupled with the output of the kinetic wave code to predict the plasma production in the designed plasma source. The power deposition profile, and hence the produced plasma density profile, can be controlled by selecting the wave number and the magnetic field. It is observed in the experiment that plasma is produced in the outer radii of the source chamber, and diffuses to form a radially uniform profile in the diffusion chamber in accordance with the simulation.
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.36.4572