Plasma diagnostics in rf discharges using nonlinear and resonance effects

In modelling rf discharges, nonlinear phenomena usually are treated as inconvenient effects. A method based on a nonlinear phenomenon is the self excited electron plasma resonance spectroscopy (SEERS). This new method for plasma monitoring allows to determine density and collision rate of the electr...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1997-07, Vol.36 (7B), p.4625-4631
Main Authors: KLICK, M, REHAK, W, KAMMEYER, M
Format: Article
Language:English
Subjects:
Electric discharges
Exact sciences and technology
Other gas discharges
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma production and heating
Plasma sources
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Summary:In modelling rf discharges, nonlinear phenomena usually are treated as inconvenient effects. A method based on a nonlinear phenomenon is the self excited electron plasma resonance spectroscopy (SEERS). This new method for plasma monitoring allows to determine density and collision rate of the electrons and the power dissipated in the plasma body. Microwave interferometry (MWI) and Langmuir probe (LP) measurements were used to verify this method. This is shown for inert (He, Ar) and electronegative gases ( O 2 , CF 4 ). Examples of in situ control in plasma etching process are described. The high sensitivity and the capability of endpoint detection are shown.
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.36.4625