Positive Ions in C 4 F 8 RF Discharge in a Planar Diode

Positive ions were measured in situ by direct sampling from C 4 F 8 discharge at 13.56 MHz using a quadrupole mass spectrometer. Major positive ions in the discharge plasma are CF + , CF 2 + , CF 3 + , C 2 F 4 + , C 2 F 5 + and C 3 F 5 + . When the gas flow rate increases, the signal intensity of C...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1997-08, Vol.36 (8R), p.5296
Main Authors: Shinya Sasaki, Shinya Sasaki, Yuji Hirose, Yuji Hirose, Itsuo Ishikawa, Itsuo Ishikawa, Kazuya Nagaseki, Kazuya Nagaseki, Yukinori Saito, Yukinori Saito, Shinji Suganomata, Shinji Suganomata
Format: Article
Language:English
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Summary:Positive ions were measured in situ by direct sampling from C 4 F 8 discharge at 13.56 MHz using a quadrupole mass spectrometer. Major positive ions in the discharge plasma are CF + , CF 2 + , CF 3 + , C 2 F 4 + , C 2 F 5 + and C 3 F 5 + . When the gas flow rate increases, the signal intensity of C 2 F 4 + increases. The intensity variation of C 3 F 5 + is similar to that of C 2 F 4 + . However, those of CF 3 + and C 2 F 5 + decrease with increasing gas flow rate, and those of CF + and CF 2 + are almost constant. The difference in intensity variations is considered to result from the production processes of ions.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.36.5296