Computer Studies of Depth Profiles due to Carbon Fullerene Impacts on a TiD 2 Target

We studied the depth profile due to carbon fullerene impacts on a TiD 2 target, using the time-evolution Monte Carlo code DYACAT. Simulations have been performed for incident energies per atom of 100 eV–5 keV, and for the clusters (C) N ( N =30–240) and a monatomic ion. In the case of the lower ener...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1997-10, Vol.36 (10R), p.6545
Main Authors: Tetsuya Muramoto, Tetsuya Muramoto, Yasunori Yamamura, Yasunori Yamamura
Format: Article
Language:English
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Summary:We studied the depth profile due to carbon fullerene impacts on a TiD 2 target, using the time-evolution Monte Carlo code DYACAT. Simulations have been performed for incident energies per atom of 100 eV–5 keV, and for the clusters (C) N ( N =30–240) and a monatomic ion. In the case of the lower energy cluster bombardment, the projected range of carbon fullerenes is larger than that of monatomic ions, because the cluster atoms in the lower part of the cluster clear the way for the subsequent cluster atoms. In the higher cluster energy region, the projected range is smaller than that of monatomic ions, because the initial velocity of the cluster atoms is randomized due to collisions of a cluster atom with a cluster atom or a moving target atom. The cluster effect of the projected range is determined by the competition process of the clearing-the-way effect and the cluster-enhanced randomization effect.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.36.6545