High-Speed Convolution System for Real-Time Proximity Effect Correction

In order to realize a real-time proximity effect correction system, a high-speed, highly accurate hardware system for convolution calculation has been developed. The representative figure method is used in the system. Pipeline architecture and parallel processing architecture are also used. The calc...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1998-12, Vol.37 (12S), p.6779
Main Authors: Susumu Oogi, Susumu Oogi, Takiji Ishimura, Takiji Ishimura, Takashi Kamikubo, Takashi Kamikubo, Mitsuko Shimizu, Mitsuko Shimizu, Yoshiaki Hattori, Yoshiaki Hattori, Tomohiro Iijima, Tomohiro Iijima, Hirohito Anze, Hirohito Anze, Takayuki Abe, Takayuki Abe, Toru Tojo, Toru Tojo, Tadahiro Takigawa, Tadahiro Takigawa
Format: Article
Language:English
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Summary:In order to realize a real-time proximity effect correction system, a high-speed, highly accurate hardware system for convolution calculation has been developed. The representative figure method is used in the system. Pipeline architecture and parallel processing architecture are also used. The calculation speed of the system is 500 s for a writing region of 10 ×10 cm. The optimum correction dose has been evaluated using the output data of the convolution system. The error in the correction dose caused by our system is found to be 0.5% at most. These results suggest that a real-time proximity effect correction system can be realized, which can be used for making reticles of Gbit-class dynamic ramdom access memories (DRAMs).
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.37.6779