Micro Electro Mechanical Systems: From Research to Applications

Micro electro mechanical systems (MEMS) are in the transition phase from research to industry. This paper intends to describe this process from the point of view of a European R&D institution. The MEMS market, its development and its most important products are discussed. In the second part, the...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1998-12, Vol.37 (12S), p.7047
Main Authors: Lang, Walter, Sandmaier, Hermann
Format: Article
Language:English
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Summary:Micro electro mechanical systems (MEMS) are in the transition phase from research to industry. This paper intends to describe this process from the point of view of a European R&D institution. The MEMS market, its development and its most important products are discussed. In the second part, the R&D activities at HSG-IMIT in Germany are described. The last chapter deals with the cooperation between the R&D institution and industry, in particular with local German small-and medium-sized enterprises.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.37.7047