Micro Electro Mechanical Systems: From Research to Applications

Micro electro mechanical systems (MEMS) are in the transition phase from research to industry. This paper intends to describe this process from the point of view of a European R&D institution. The MEMS market, its development and its most important products are discussed. In the second part, the...

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Published in:Japanese Journal of Applied Physics 1998-12, Vol.37 (12S), p.7047
Main Authors: Lang, Walter, Sandmaier, Hermann
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Language:English
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cited_by cdi_FETCH-LOGICAL-c299t-f469a06312156b7029a446c32af569887194657bba4af17ddaca3a93381892173
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container_end_page
container_issue 12S
container_start_page 7047
container_title Japanese Journal of Applied Physics
container_volume 37
creator Lang, Walter
Sandmaier, Hermann
description Micro electro mechanical systems (MEMS) are in the transition phase from research to industry. This paper intends to describe this process from the point of view of a European R&D institution. The MEMS market, its development and its most important products are discussed. In the second part, the R&D activities at HSG-IMIT in Germany are described. The last chapter deals with the cooperation between the R&D institution and industry, in particular with local German small-and medium-sized enterprises.
doi_str_mv 10.1143/JJAP.37.7047
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fullrecord <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1143_JJAP_37_7047</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1143_JJAP_37_7047</sourcerecordid><originalsourceid>FETCH-LOGICAL-c299t-f469a06312156b7029a446c32af569887194657bba4af17ddaca3a93381892173</originalsourceid><addsrcrecordid>eNotj11LwzAYhYMoWKd3_oD8AFvzJmnSeCNlbOrYUPy4Dm-zlFXatSS92b9fi149HDgczkPIPbAMQIrHzab8yITONJP6giQgpE4lU_klSRjjkErD-TW5ifF3iiqXkJDnXeNCT1etd-PEnXcHPDYOW_p1iqPv4hNdh76jnz56DO5Ax56Ww9BOlbHpj_GWXNXYRn_3zwX5Wa--l6_p9v3lbVluU8eNGdNaKoNMCeCQq0ozblBK5QTHOlemKDQYqXJdVSixBr3fo0OBRogCCsNBiwV5-Nud3sYYfG2H0HQYThaYneXtLG-FtrO8OAPYa0si</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Micro Electro Mechanical Systems: From Research to Applications</title><source>Institute of Physics</source><creator>Lang, Walter ; Sandmaier, Hermann</creator><creatorcontrib>Lang, Walter ; Sandmaier, Hermann</creatorcontrib><description>Micro electro mechanical systems (MEMS) are in the transition phase from research to industry. This paper intends to describe this process from the point of view of a European R&amp;D institution. The MEMS market, its development and its most important products are discussed. In the second part, the R&amp;D activities at HSG-IMIT in Germany are described. The last chapter deals with the cooperation between the R&amp;D institution and industry, in particular with local German small-and medium-sized enterprises.</description><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.1143/JJAP.37.7047</identifier><language>eng</language><ispartof>Japanese Journal of Applied Physics, 1998-12, Vol.37 (12S), p.7047</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c299t-f469a06312156b7029a446c32af569887194657bba4af17ddaca3a93381892173</citedby><cites>FETCH-LOGICAL-c299t-f469a06312156b7029a446c32af569887194657bba4af17ddaca3a93381892173</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Lang, Walter</creatorcontrib><creatorcontrib>Sandmaier, Hermann</creatorcontrib><title>Micro Electro Mechanical Systems: From Research to Applications</title><title>Japanese Journal of Applied Physics</title><description>Micro electro mechanical systems (MEMS) are in the transition phase from research to industry. This paper intends to describe this process from the point of view of a European R&amp;D institution. The MEMS market, its development and its most important products are discussed. In the second part, the R&amp;D activities at HSG-IMIT in Germany are described. The last chapter deals with the cooperation between the R&amp;D institution and industry, in particular with local German small-and medium-sized enterprises.</description><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1998</creationdate><recordtype>article</recordtype><recordid>eNotj11LwzAYhYMoWKd3_oD8AFvzJmnSeCNlbOrYUPy4Dm-zlFXatSS92b9fi149HDgczkPIPbAMQIrHzab8yITONJP6giQgpE4lU_klSRjjkErD-TW5ifF3iiqXkJDnXeNCT1etd-PEnXcHPDYOW_p1iqPv4hNdh76jnz56DO5Ax56Ww9BOlbHpj_GWXNXYRn_3zwX5Wa--l6_p9v3lbVluU8eNGdNaKoNMCeCQq0ozblBK5QTHOlemKDQYqXJdVSixBr3fo0OBRogCCsNBiwV5-Nud3sYYfG2H0HQYThaYneXtLG-FtrO8OAPYa0si</recordid><startdate>19981201</startdate><enddate>19981201</enddate><creator>Lang, Walter</creator><creator>Sandmaier, Hermann</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>19981201</creationdate><title>Micro Electro Mechanical Systems: From Research to Applications</title><author>Lang, Walter ; Sandmaier, Hermann</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c299t-f469a06312156b7029a446c32af569887194657bba4af17ddaca3a93381892173</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1998</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lang, Walter</creatorcontrib><creatorcontrib>Sandmaier, Hermann</creatorcontrib><collection>CrossRef</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Lang, Walter</au><au>Sandmaier, Hermann</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Micro Electro Mechanical Systems: From Research to Applications</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><date>1998-12-01</date><risdate>1998</risdate><volume>37</volume><issue>12S</issue><spage>7047</spage><pages>7047-</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><abstract>Micro electro mechanical systems (MEMS) are in the transition phase from research to industry. This paper intends to describe this process from the point of view of a European R&amp;D institution. The MEMS market, its development and its most important products are discussed. In the second part, the R&amp;D activities at HSG-IMIT in Germany are described. The last chapter deals with the cooperation between the R&amp;D institution and industry, in particular with local German small-and medium-sized enterprises.</abstract><doi>10.1143/JJAP.37.7047</doi></addata></record>
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ispartof Japanese Journal of Applied Physics, 1998-12, Vol.37 (12S), p.7047
issn 0021-4922
1347-4065
language eng
recordid cdi_crossref_primary_10_1143_JJAP_37_7047
source Institute of Physics
title Micro Electro Mechanical Systems: From Research to Applications
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T18%3A07%3A01IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Micro%20Electro%20Mechanical%20Systems:%20From%20Research%20to%20Applications&rft.jtitle=Japanese%20Journal%20of%20Applied%20Physics&rft.au=Lang,%20Walter&rft.date=1998-12-01&rft.volume=37&rft.issue=12S&rft.spage=7047&rft.pages=7047-&rft.issn=0021-4922&rft.eissn=1347-4065&rft_id=info:doi/10.1143/JJAP.37.7047&rft_dat=%3Ccrossref%3E10_1143_JJAP_37_7047%3C/crossref%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c299t-f469a06312156b7029a446c32af569887194657bba4af17ddaca3a93381892173%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true