Atomic-Scale Electron Beam Processing

Atomic-scale electron beam processing was demonstrated using high-resolution transmission electron microscopy. Nanometer-size holes were produced through mag nesium oxide films. The minimum hole size was 0.84 nm and the minimum distance between the holes was 0.63 nm.

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1999, Vol.38 (3R), p.1595
Main Authors: Kizuka, Tokushi, Yanaka, Takashi
Format: Article
Language:English
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Description
Summary:Atomic-scale electron beam processing was demonstrated using high-resolution transmission electron microscopy. Nanometer-size holes were produced through mag nesium oxide films. The minimum hole size was 0.84 nm and the minimum distance between the holes was 0.63 nm.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.38.1595