Adsorption of Fluorine on Bare, Hydrogen- and Hydrocarbon-Covered Diamond C(111) Surfaces

• Published in: Japanese Journal of Applied Physics 2000-04, Vol.39 (4R), p.1826
• Main Authors: Yamada, Taro, Seki, Hajime, Chuang, Tung J.
• Format: Article
• Language: English
• ISSN: 0021-4922; 1347-4065
• DOI: 10.1143/JJAP.39.1826

The adsorption of fluorine delivered as xenon difluoride has been examined on a bare diamond C(111)(2×1) surface as well as modified surfaces of hydrogen-terminated H:C(111)(1×1) and hydrocarbon-precovered CH x /C(111) by means of Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS) and low-energy electron diffraction (LEED). The F intake by bare C(111)(2×1) at nearly 10 5 Langmuir of XeF 2 exposure reached close to two monolayers on C(111). The adsorbed F was removed by annealing to 1400 K in vacuum, and was replaced by atomic hydrogen generated by a hot filament. The saturation coverage of F on H:C(111)(1×1) was one monolayer. The adsorbed F on H:C(111)(1×1) was removed by annealing to 1300 K and H:C(111)(1×1) was restored. On C(111) precovered with CH x groups, the initial sticking probability of F was definitely smaller than that of C(111)(2×1). The adsorbed F was less stable and desorbed completely at 1200 K. The structures of adsorbed F on C(111)(2×1) and H:C(111)(1×1) are discussed.