Stabilization of Oxygen Diffusion in Ga-Doped YBa 2 Cu 3 O 7-δ Thin Films Observed by Spectroscopic Ellipsometry

We have investigated growth monitoring and the deoxidation process of Ga-doped YBa 2 Cu 3 O 7-δ (YBCO) thin films using spectroscopic ellipsometry. The imaginary part of the pseudodielectric function, ε i , at 4.1 eV is very sensitive to the structure of YBCO. By monitoring the difference between un...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2000-10, Vol.39 (10B), p.L1032
Main Authors: Sugai, Satoshi, Matsukawa, Yasunari, Shimosato, Keiji, Oda, Shunri
Format: Article
Language:English
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Summary:We have investigated growth monitoring and the deoxidation process of Ga-doped YBa 2 Cu 3 O 7-δ (YBCO) thin films using spectroscopic ellipsometry. The imaginary part of the pseudodielectric function, ε i , at 4.1 eV is very sensitive to the structure of YBCO. By monitoring the difference between undoped and Ga-doped YBCO during deposition we can evaluate the content of Ga substituted for Cu(I) in YBCO. Furthermore, monitoring of ε i at 4.1 eV during deoxidation indicates that the oxygen in the CuO chain of Ga-doped YBCO is more stable than that of undoped YBCO.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.39.L1032