Formation of Diamond Like Carbon by a Pure Carbon Arc Under High Vacuum

The arc discharge plasma of solid carbon has been applied to the formation of hard carbon thin films. A double-mesh electrode is placed at the exit of the sharply directed arc plasma column confined in the magnetic bottle. The radio frequency voltage applied to the electrode is effective to diverge...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2001-02, Vol.40 (2S), p.1064
Main Authors: Tamba, Moritake, Kawamura, Kazuhiko, Okazaki, Kiyohiko, Amemiya, Hiroshi
Format: Article
Language:English
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Summary:The arc discharge plasma of solid carbon has been applied to the formation of hard carbon thin films. A double-mesh electrode is placed at the exit of the sharply directed arc plasma column confined in the magnetic bottle. The radio frequency voltage applied to the electrode is effective to diverge the plasma column radially to form a uniform plasma in front of the substrate and also to remove macroparticles. The characteristics of the obtained film are examined using Raman spectra and other techniques.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.40.1064