Separation of Townsend Secondary Electron Emission Coefficients by Frequency Response Analysis

A procedure to separate the Townsend secondary electron emission coefficient γ T into three components γ Ti , γ Tp and γ Tm due to ions, photons and metastables, respectively, is presented. The amplification system of ionization current in the form of a positive feedback amplifier with three feedbac...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2001-05, Vol.40 (5R), p.3389
Main Authors: Tsurugida, Kanji, Otsubo, Masahisa, Honda, Chikahisa, Ikuta, Nobuaki
Format: Article
Language:English
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Summary:A procedure to separate the Townsend secondary electron emission coefficient γ T into three components γ Ti , γ Tp and γ Tm due to ions, photons and metastables, respectively, is presented. The amplification system of ionization current in the form of a positive feedback amplifier with three feedback paths is analyzed in the frequency domain with the system functions given as the Fourier transform of the dynamic properties in the respective paths. The system functions in the three paths change values in different frequency ranges, and thus the three components are separated clearly. As a result of preliminary measurement electrode current in Ar, the separated values of γ Ti , γ Tp and γ Tm are presented and elucidated.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.40.3389