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Boundary Structure of Mo/Si Multilayers for Soft X-Ray Mirrors

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2002, Vol.41 (Part 1, No. 5A), p.3052-3056
Main Authors: Ishino, Masahiko, Yoda, Osamu, Haishi, Yasuyuki, Arimoto, Fumiko, Takeda, Mitsuhiro, Watanabe, Seiichi, Ohnuki, Somei, Abe, Hiroaki
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.41.3052