Measurement of Electron Density of Reactive Plasma Using a Plasma Oscillation Method

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2002, Vol.41 (Part 1, No. 6A), p.3963-3964
Main Authors: Kanoh, Masaaki, Tonotani, Junichi, Aoki, Katsuaki, Yamage, Masashi
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.41.3963