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Patterned Magnetic Permalloy and Nickel Films: Fabrication by Electron Beam and X-Ray Lithographic Techniques
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Published in: | Japanese Journal of Applied Physics 2002, Vol.41 (Part 1, No. 8), p.5149-5152 |
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Main Authors: | , , , , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that cite this one |
Online Access: | Get full text |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.41.5149 |