Enhancement of Crystallization of an Si Film on a Quartz Substrate by Thermal Electron Irradiation

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2002-12, Vol.41 (Part 2, No. 12A), p.L1396-L1398
Main Authors: Horita, Susumu, Miyoshi, Seiji
Format: Article
Language:English
Online Access:Get full text
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ISSN:0021-4922
DOI:10.1143/JJAP.41.L1396