Reliability Test Guidelines for a 0.18 µm Generation Multi-Oxide CMOS Technology for System-on-Chip Applications

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2003-04, Vol.42 (Part 1, No. 4B), p.1928-1932
Main Authors: Chen, Shang-Jr, Lin, Ching-Chung, Chung, Steve Shao-Shiun, Lin, Jung-Chun, Chu, Chih-Hsiun
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.42.1928