Control of Two Types of Dielectric Relaxation Current for Ta 2 O 5 Metal-Insulator-Metal Capacitors

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2003-04, Vol.42 (Part 1, No. 4B), p.1943-1948
Main Authors: Kiyotoshi, Masahiro, Hieda, Katsuhiko, Fukuzumi, Yoshiaki, Kohyama, Yusuke, Suzuki, Toshiya, Matsunaga, Daisuke, Hashimoto, Koichi
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.42.1943