Quantum Chemical Mechanism of Heterogeneous Reaction between Trichlorosilane and Adsorbed Water

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2003, Vol.42 (Part 1, No. 7A), p.4540-4541
Main Authors: Makita, Toshiki, Nakamura, Koichi, Tachibana, Akitomo, Masusaki, Hiroshi, Matsumoto, Koh, Ishihara, Yoshio
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.42.4540