Quantum Chemical Mechanism of Heterogeneous Reaction between Trichlorosilane and Adsorbed Water

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Published in:Japanese Journal of Applied Physics 2003, Vol.42 (Part 1, No. 7A), p.4540-4541
Main Authors: Makita, Toshiki, Nakamura, Koichi, Tachibana, Akitomo, Masusaki, Hiroshi, Matsumoto, Koh, Ishihara, Yoshio
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Language:English
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container_end_page 4541
container_issue Part 1, No. 7A
container_start_page 4540
container_title Japanese Journal of Applied Physics
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creator Makita, Toshiki
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description
doi_str_mv 10.1143/JJAP.42.4540
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source Institute of Physics IOPscience extra; Institute of Physics:Jisc Collections:IOP Publishing Read and Publish 2024-2025 (Reading List)
title Quantum Chemical Mechanism of Heterogeneous Reaction between Trichlorosilane and Adsorbed Water
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