Technique for Determination of Nitrogen Concentration in Czochralski Silicon by Infrared Absorption Measurement

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2003-03, Vol.42 (Part 2, No. 3A), p.L223-L225
Main Authors: Tanahashi, Katsuto, Yamada-Kaneta, Hiroshi
Format: Article
Language:English
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ISSN:0021-4922
DOI:10.1143/JJAP.42.L223