Quantitative Analysis of Hydrogen-Induced Si Segregation on Ge-Covered Si(001) Surface

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2003-05, Vol.42 (Part 2, No. 5A), p.L485-L488
Main Authors: Fujino, Toshiaki, Katayama, Mitsuhiro, Inoue, Shin-ichi, Tatsumi, Atsunobu, Horikawa, Takeyuki, Oura, Kenjiro
Format: Article
Language:English
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ISSN:0021-4922
DOI:10.1143/JJAP.42.L485