Morphology of Iron Silicide Nanorods Formed by Electron-Beam-Induced Deposition Using Ultrahigh-Vacuum Transmission Electron Microscope

We have fabricated Fe silicide nanorods on Si(111) substrates by both deposition at high temperatures and electron-beam-induced deposition (EBID), and observed them with an ultrahigh-vacuum transmission electron microscope. The formation of either nanotriangles or nanorods was observed depending on...

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Published in:Japanese Journal of Applied Physics 2005-07, Vol.44 (7S), p.5635
Main Authors: Tanaka, Miyoko, Han, Ming, Takeguchi, Masaki, Chu, Fengmin, Shimojo, Masayuki, Mitsuishi, Kazutaka, Furuya, Kazuo
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cited_by cdi_FETCH-LOGICAL-c383t-ae43ef99a7b2ef7b41ed2daebf51ccf7e0b9816e0b351249b2c8ba88a88722653
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container_issue 7S
container_start_page 5635
container_title Japanese Journal of Applied Physics
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creator Tanaka, Miyoko
Han, Ming
Takeguchi, Masaki
Chu, Fengmin
Shimojo, Masayuki
Mitsuishi, Kazutaka
Furuya, Kazuo
description We have fabricated Fe silicide nanorods on Si(111) substrates by both deposition at high temperatures and electron-beam-induced deposition (EBID), and observed them with an ultrahigh-vacuum transmission electron microscope. The formation of either nanotriangles or nanorods was observed depending on the surface geometry of the substrates. The nanorods grew along one of the Si directions. In the case of EBID, the size and position of the deposits were controlled by adjusting irradiation time and the position of the electron beams. The longest rods almost reached about 100 nm in length with a 10 nm width.
doi_str_mv 10.1143/JJAP.44.5635
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title Morphology of Iron Silicide Nanorods Formed by Electron-Beam-Induced Deposition Using Ultrahigh-Vacuum Transmission Electron Microscope
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