High-Efficiency Nitride-Based Light-Emitting Diodes with Moth-Eye Structure

Nitride-based blue light-emitting diodes (LEDs) with a moth-eye structure on the back of a 6H–SiC substrate have been developed. The moth-eye LED has a roughness less than the optical wavelength at the back surface of the SiC substrate fabricated by reactive ion etching (RIE) with CF 4 gas. The ligh...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2005-10, Vol.44 (10R), p.7414
Main Authors: Kasugai, Hideki, Miyake, Yasuto, Honshio, Akira, Mishima, Shunsuke, Kawashima, Takeshi, Iida, Kazuyoshi, Iwaya, Motoaki, Kamiyama, Satoshi, Amano, Hiroshi, Akasaki, Isamu, Kinoshita, Hiroyuki, Shiomi, Hiromu
Format: Article
Language:English
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Summary:Nitride-based blue light-emitting diodes (LEDs) with a moth-eye structure on the back of a 6H–SiC substrate have been developed. The moth-eye LED has a roughness less than the optical wavelength at the back surface of the SiC substrate fabricated by reactive ion etching (RIE) with CF 4 gas. The light extraction efficiency and corresponding output power have been increased to 3.8 times those of a LED with a conventional structure. The experimental findings agree with the results of a theoretical analysis of the effect of the moth-eye structure.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.44.7414