High-Efficiency Nitride-Based Light-Emitting Diodes with Moth-Eye Structure

Nitride-based blue light-emitting diodes (LEDs) with a moth-eye structure on the back of a 6H–SiC substrate have been developed. The moth-eye LED has a roughness less than the optical wavelength at the back surface of the SiC substrate fabricated by reactive ion etching (RIE) with CF 4 gas. The ligh...

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Published in:Japanese Journal of Applied Physics 2005-10, Vol.44 (10R), p.7414
Main Authors: Kasugai, Hideki, Miyake, Yasuto, Honshio, Akira, Mishima, Shunsuke, Kawashima, Takeshi, Iida, Kazuyoshi, Iwaya, Motoaki, Kamiyama, Satoshi, Amano, Hiroshi, Akasaki, Isamu, Kinoshita, Hiroyuki, Shiomi, Hiromu
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cited_by cdi_FETCH-LOGICAL-c344t-ade540a2715ab419f13e7408866710d97e9b184f382e707742ce3e6f6ca095683
cites cdi_FETCH-LOGICAL-c344t-ade540a2715ab419f13e7408866710d97e9b184f382e707742ce3e6f6ca095683
container_end_page
container_issue 10R
container_start_page 7414
container_title Japanese Journal of Applied Physics
container_volume 44
creator Kasugai, Hideki
Miyake, Yasuto
Honshio, Akira
Mishima, Shunsuke
Kawashima, Takeshi
Iida, Kazuyoshi
Iwaya, Motoaki
Kamiyama, Satoshi
Amano, Hiroshi
Akasaki, Isamu
Kinoshita, Hiroyuki
Shiomi, Hiromu
description Nitride-based blue light-emitting diodes (LEDs) with a moth-eye structure on the back of a 6H–SiC substrate have been developed. The moth-eye LED has a roughness less than the optical wavelength at the back surface of the SiC substrate fabricated by reactive ion etching (RIE) with CF 4 gas. The light extraction efficiency and corresponding output power have been increased to 3.8 times those of a LED with a conventional structure. The experimental findings agree with the results of a theoretical analysis of the effect of the moth-eye structure.
doi_str_mv 10.1143/JJAP.44.7414
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fullrecord <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1143_JJAP_44_7414</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1143_JJAP_44_7414</sourcerecordid><originalsourceid>FETCH-LOGICAL-c344t-ade540a2715ab419f13e7408866710d97e9b184f382e707742ce3e6f6ca095683</originalsourceid><addsrcrecordid>eNotkMtOwzAURC0EEqWw4wPyAbj4xjd2siwlUEp4SMA6cp3r1og2yHaF-vc0gtVoNDqzOIxdgpgAoLxeLKavE8SJRsAjNgKJmqNQxTEbCZEDxyrPT9lZjJ-HqgqEEXuc-9Wa185562lr99mzT8F3xG9MpC5rDmvi9can5Ler7Nb3HcXsx6d19tSnA7in7C2FnU27QOfsxJmvSBf_OWYfd_X7bM6bl_uH2bThViImbjoqUJhcQ2GWCJUDSRpFWSqlQXSVpmoJJTpZ5qSF1phbkqScskZUhSrlmF39_drQxxjItd_Bb0zYtyDaQUQ7iGgR20GE_AUYi0-A</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>High-Efficiency Nitride-Based Light-Emitting Diodes with Moth-Eye Structure</title><source>IOPscience journals</source><source>Institute of Physics</source><creator>Kasugai, Hideki ; Miyake, Yasuto ; Honshio, Akira ; Mishima, Shunsuke ; Kawashima, Takeshi ; Iida, Kazuyoshi ; Iwaya, Motoaki ; Kamiyama, Satoshi ; Amano, Hiroshi ; Akasaki, Isamu ; Kinoshita, Hiroyuki ; Shiomi, Hiromu</creator><creatorcontrib>Kasugai, Hideki ; Miyake, Yasuto ; Honshio, Akira ; Mishima, Shunsuke ; Kawashima, Takeshi ; Iida, Kazuyoshi ; Iwaya, Motoaki ; Kamiyama, Satoshi ; Amano, Hiroshi ; Akasaki, Isamu ; Kinoshita, Hiroyuki ; Shiomi, Hiromu</creatorcontrib><description>Nitride-based blue light-emitting diodes (LEDs) with a moth-eye structure on the back of a 6H–SiC substrate have been developed. The moth-eye LED has a roughness less than the optical wavelength at the back surface of the SiC substrate fabricated by reactive ion etching (RIE) with CF 4 gas. The light extraction efficiency and corresponding output power have been increased to 3.8 times those of a LED with a conventional structure. The experimental findings agree with the results of a theoretical analysis of the effect of the moth-eye structure.</description><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.1143/JJAP.44.7414</identifier><language>eng</language><ispartof>Japanese Journal of Applied Physics, 2005-10, Vol.44 (10R), p.7414</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c344t-ade540a2715ab419f13e7408866710d97e9b184f382e707742ce3e6f6ca095683</citedby><cites>FETCH-LOGICAL-c344t-ade540a2715ab419f13e7408866710d97e9b184f382e707742ce3e6f6ca095683</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,778,782,27911,27912</link.rule.ids></links><search><creatorcontrib>Kasugai, Hideki</creatorcontrib><creatorcontrib>Miyake, Yasuto</creatorcontrib><creatorcontrib>Honshio, Akira</creatorcontrib><creatorcontrib>Mishima, Shunsuke</creatorcontrib><creatorcontrib>Kawashima, Takeshi</creatorcontrib><creatorcontrib>Iida, Kazuyoshi</creatorcontrib><creatorcontrib>Iwaya, Motoaki</creatorcontrib><creatorcontrib>Kamiyama, Satoshi</creatorcontrib><creatorcontrib>Amano, Hiroshi</creatorcontrib><creatorcontrib>Akasaki, Isamu</creatorcontrib><creatorcontrib>Kinoshita, Hiroyuki</creatorcontrib><creatorcontrib>Shiomi, Hiromu</creatorcontrib><title>High-Efficiency Nitride-Based Light-Emitting Diodes with Moth-Eye Structure</title><title>Japanese Journal of Applied Physics</title><description>Nitride-based blue light-emitting diodes (LEDs) with a moth-eye structure on the back of a 6H–SiC substrate have been developed. The moth-eye LED has a roughness less than the optical wavelength at the back surface of the SiC substrate fabricated by reactive ion etching (RIE) with CF 4 gas. The light extraction efficiency and corresponding output power have been increased to 3.8 times those of a LED with a conventional structure. The experimental findings agree with the results of a theoretical analysis of the effect of the moth-eye structure.</description><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNotkMtOwzAURC0EEqWw4wPyAbj4xjd2siwlUEp4SMA6cp3r1og2yHaF-vc0gtVoNDqzOIxdgpgAoLxeLKavE8SJRsAjNgKJmqNQxTEbCZEDxyrPT9lZjJ-HqgqEEXuc-9Wa185562lr99mzT8F3xG9MpC5rDmvi9can5Ler7Nb3HcXsx6d19tSnA7in7C2FnU27QOfsxJmvSBf_OWYfd_X7bM6bl_uH2bThViImbjoqUJhcQ2GWCJUDSRpFWSqlQXSVpmoJJTpZ5qSF1phbkqScskZUhSrlmF39_drQxxjItd_Bb0zYtyDaQUQ7iGgR20GE_AUYi0-A</recordid><startdate>20051001</startdate><enddate>20051001</enddate><creator>Kasugai, Hideki</creator><creator>Miyake, Yasuto</creator><creator>Honshio, Akira</creator><creator>Mishima, Shunsuke</creator><creator>Kawashima, Takeshi</creator><creator>Iida, Kazuyoshi</creator><creator>Iwaya, Motoaki</creator><creator>Kamiyama, Satoshi</creator><creator>Amano, Hiroshi</creator><creator>Akasaki, Isamu</creator><creator>Kinoshita, Hiroyuki</creator><creator>Shiomi, Hiromu</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20051001</creationdate><title>High-Efficiency Nitride-Based Light-Emitting Diodes with Moth-Eye Structure</title><author>Kasugai, Hideki ; Miyake, Yasuto ; Honshio, Akira ; Mishima, Shunsuke ; Kawashima, Takeshi ; Iida, Kazuyoshi ; Iwaya, Motoaki ; Kamiyama, Satoshi ; Amano, Hiroshi ; Akasaki, Isamu ; Kinoshita, Hiroyuki ; Shiomi, Hiromu</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c344t-ade540a2715ab419f13e7408866710d97e9b184f382e707742ce3e6f6ca095683</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kasugai, Hideki</creatorcontrib><creatorcontrib>Miyake, Yasuto</creatorcontrib><creatorcontrib>Honshio, Akira</creatorcontrib><creatorcontrib>Mishima, Shunsuke</creatorcontrib><creatorcontrib>Kawashima, Takeshi</creatorcontrib><creatorcontrib>Iida, Kazuyoshi</creatorcontrib><creatorcontrib>Iwaya, Motoaki</creatorcontrib><creatorcontrib>Kamiyama, Satoshi</creatorcontrib><creatorcontrib>Amano, Hiroshi</creatorcontrib><creatorcontrib>Akasaki, Isamu</creatorcontrib><creatorcontrib>Kinoshita, Hiroyuki</creatorcontrib><creatorcontrib>Shiomi, Hiromu</creatorcontrib><collection>CrossRef</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kasugai, Hideki</au><au>Miyake, Yasuto</au><au>Honshio, Akira</au><au>Mishima, Shunsuke</au><au>Kawashima, Takeshi</au><au>Iida, Kazuyoshi</au><au>Iwaya, Motoaki</au><au>Kamiyama, Satoshi</au><au>Amano, Hiroshi</au><au>Akasaki, Isamu</au><au>Kinoshita, Hiroyuki</au><au>Shiomi, Hiromu</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>High-Efficiency Nitride-Based Light-Emitting Diodes with Moth-Eye Structure</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><date>2005-10-01</date><risdate>2005</risdate><volume>44</volume><issue>10R</issue><spage>7414</spage><pages>7414-</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><abstract>Nitride-based blue light-emitting diodes (LEDs) with a moth-eye structure on the back of a 6H–SiC substrate have been developed. The moth-eye LED has a roughness less than the optical wavelength at the back surface of the SiC substrate fabricated by reactive ion etching (RIE) with CF 4 gas. The light extraction efficiency and corresponding output power have been increased to 3.8 times those of a LED with a conventional structure. The experimental findings agree with the results of a theoretical analysis of the effect of the moth-eye structure.</abstract><doi>10.1143/JJAP.44.7414</doi></addata></record>
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title High-Efficiency Nitride-Based Light-Emitting Diodes with Moth-Eye Structure
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-15T23%3A49%3A55IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=High-Efficiency%20Nitride-Based%20Light-Emitting%20Diodes%20with%20Moth-Eye%20Structure&rft.jtitle=Japanese%20Journal%20of%20Applied%20Physics&rft.au=Kasugai,%20Hideki&rft.date=2005-10-01&rft.volume=44&rft.issue=10R&rft.spage=7414&rft.pages=7414-&rft.issn=0021-4922&rft.eissn=1347-4065&rft_id=info:doi/10.1143/JJAP.44.7414&rft_dat=%3Ccrossref%3E10_1143_JJAP_44_7414%3C/crossref%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c344t-ade540a2715ab419f13e7408866710d97e9b184f382e707742ce3e6f6ca095683%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true