Graphitization of Tetrahedral Amorphous Carbon Films Induced by Core Electron Excitations

We studied effects of soft X-ray illumination on tetrahedral amorphous carbon (ta-C) films by in situ measuring spectra of X-ray absorption and resonant Auger electron emission. Illumination with 285 ±3.5 eV photons, resonant mainly with the π * peak associated with graphitic structures and partly w...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2005-01, Vol.44 (11L), p.L1472
Main Authors: Liang, Shijin, Harada, Yoshihisa, Shin, Shik, Kitajima, Yoshinori, Mera, Yutaka, Maeda, Koji
Format: Article
Language:English
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Summary:We studied effects of soft X-ray illumination on tetrahedral amorphous carbon (ta-C) films by in situ measuring spectra of X-ray absorption and resonant Auger electron emission. Illumination with 285 ±3.5 eV photons, resonant mainly with the π * peak associated with graphitic structures and partly with the tentatively assigned σ * core exciton peak, induced a change in the surface-sensitive absorption and Auger spectra which is interpreted as an increase of graphitic phase, similar to but slightly different from the structural conversion from sp 3 to sp 2 bonding that is induced by 200 keV electron beam irradiation previously found by the authors.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.44.L1472