Study on the O 2 Plasma Treatment of Indium Tin Oxide for Organic Light Emitting Diodes Using Inductively Coupled Plasma

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2006-04, Vol.45 (4R), p.2788
Main Authors: Jeong, Chang Hyun, Lee, June Hee, Lim, Jong Hyeuk, Lim, Jong Tae, Yeom, Geun Young
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.45.2788