Dielectric Constant Behavior of Hf–O–N System

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2006-04, Vol.45 (4S), p.2908
Main Authors: Ino, Tsunehiro, Kamimuta, Yuuichi, Suzuki, Masamichi, Koyama, Masato, Nishiyama, Akira
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.45.2908