Investigation and Modeling of Stress Interactions on 90 nm Silicon on Insulator Complementary Metal Oxide Semiconductor by Various Mobility Enhancement Approaches

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2006-04, Vol.45 (4S), p.3049
Main Authors: Lin, Chien-Ting, Fang, Yean-Kuen, Yeh, Wen-Kuan, Lee, Tung-Hsing, Chen, Ming-Hing, Hsu, Che-Hua, Chen, Liang-Wei, Chang, Hui-Chen, Tsai, Cheng-Tzung, Ma, Mike
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.45.3049