Mask Haze Measurement by Spectroscopic Ellipsometry

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2006-06, Vol.45 (6S), p.5388
Main Authors: Kim, Young-Hoon, Kim, Sung-Hyuck, Cho, Han-Koo, An, Ilsin, Oh, Hye-Keun
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.45.5388