Mechanism of Microstructure Evolution for the Cu/Ta/GaAs Structure after Thermal Annealing

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2007-04, Vol.46 (4R), p.1409
Main Authors: Chang, Chun-Wei, Lee, Huang-Ming, Chen, Chang-You, Chang, Li, Chang, Edward Y.
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.46.1409