Luminescence Mechanism of SiO x Films Grown by Atmospheric-Pressure Halide Chemical Vapor Deposition

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2007-11, Vol.46 (11R), p.7542
Main Authors: Huang, Yu-Hsiang, Li, Zhen-Yu, Chen, Meng-Chu, Ku, Chien-Te, Chen, Ying-Ru, Uen, Wu-Yih, Lin, Chia-Hung, Lan, Shan-Ming, Yang, Tsun-Neng, Shen, Ji-Lin
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.46.7542