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High-Accuracy Proximity Effect Correction for Mask Writing

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2007-02, Vol.46 (2R), p.826
Main Authors: Abe, Takayuki, Hattori, Yoshiaki, Iijima, Tomohiro, Anze, Hirohito, Oogi, Susumu, Kamikubo, Takashi, Tsuchiya, Seiichi, Shimizu, Matsuki, Kazuto, Inoue, Hideo, Tojo, Takigawa, Tadahiro
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.46.826