Characteristics of Inductively Coupled Plasma using Internal Double Comb-type Antenna for Flat Panel Display Processing

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2007-12, Vol.46 (12L), p.L1216
Main Authors: Lim, Jong Hyeuk, Kim, Kyong Nam, Park, Jung Kyun, Park, Jae Hun, Yeom, Geun Young
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.46.L1216